Description
3D WHITE LIGHT INTERFEROMETER
The 3D white light interferometers are available with 3 measurement ranges: 100 µm, 250 µm and 400 µm. The resolution in z-direction is 0.1 nm.
The reflected light from an object surface is separated into a reference beam and an object beam. The light from the reference mirror and the measured object is superposed. A camera captures the resulting interference pattern. While the objective is moved in small steps in z-direction an image is taken at each position. All images are compiled to obtain the 3D topography.
| OBJECTIVE | Z-RESOLUTION | XY RESOLUTION | FIELD OF VIEW | WORKING DISTANCE |
| 2.5X | 1 nm | 9.24 µm | 7.12 mm x 5.34 mm | 10.3 mm |
| 5X | 1 nm | 4.62 µm | 3.56 mm x 2.67 mm | 9.3 mm |
| 10X | 1 nm | 2.31 µm | 1.78 mm x 1.34 mm | 7.4 mm |
| 20X | 0.1 nm | 1.16 µm | 0.89 mm x 0.66 mm | 4.7 mm |
| 50X | 0.1 nm | 0.46 µm | 0.36 mm x 0.27 mm | 3.4 mm |
| 100X | 0.1 nm | 0.23 µm | 0.18 mm x 0.13 mm | 2.0 mm |
