Description

CT 300 – Non Contact Profilometer

– Large 315 mm x 315 mm scanning area
– Fast, precise and accurate measurement on small and large samples
– User friendly concept
– Sophisticated analysis and automation software

The CT 300 is a non-contact profilometer with a 315 mm x-, y-motion system. It can handle up 12? wafers or other large substrates and parts. It is ideal for measuring flatness with sub-micron accuracy over the complete 315 mm travel. Using a chromatic white light sensor and a data collection rate of up to 4 kHz the inspection time is minimized. The sensors are available with a resolution down to 3 nm and a measurement range up to 25 mm. With our multi-sensor technology several sensor heads can be mounted simultaneously including infrared interferometers for measureing wafer thickness.

Technology

– Fast and accurate magnetic linear motors
– Measurement speed 2kHz (4kHz, 14 kHz optional)
– 315 mm travel in x- and y-direction, lateral resolution 0.05 µm, optional motorized z-axis
– 2D profiles and 3D topographical maps (topography measurement)
– Large scanning areas, up to the maximum travel of 315 mm with maximum x-, y-, z-resolution
– Laser confocal and chromatic white light sensors
– Resolution down to 3 nm, measurement range up to 25 mm
– On-axis camera or high resolution off-axis camera